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半導體封測工藝過程控温

冠亞恒溫有豐富的半導體封測行業産品研發經驗，豐富的産品線滿足行業各種控溫需求。

産品包括：Chiller制冷加熱系統，Chiller制冷循環器，換熱控溫單元，直冷機，Chiller氣體控溫，chamber試驗箱等産品。

解決方案

SOLUTION

半導體封測工藝是半導體生産流程中的關鍵環節，包括晶圓測試、芯片封裝和封裝後測試。這一流程不僅要求高度的精確性和可靠性，還需要對溫度進行嚴格控制，以確保産品的質量和性能。

冠亞恒溫LNEYA提供豐富控溫方式，有直冷、液冷、氣冷三種形式，滿足封測工藝複雜嚴苛控溫需求。

Chiller控溫系統FLTZ系列

真空溫控卡盤8/12寸Chuck，冷板

換熱控溫單元ETCU系列

Chiller直冷機KSD/ZLTZ/ZLJ系列

Chamber試驗箱老化箱/多層溫箱

Chiller氣體控溫AES/LQ/AI/AET/DR

負壓型溫控機組ZLFQ-80

FLTZ變頻Chiller

—单通道 Single Channel Chiller

單通道Chiller溫度範圍：-100~+90℃，主要應用與半導體生産過程中及測試環節的溫度精准控制，司在系統中應用多種算法，實現系統快速響應、較高的控制精度。

LTZ變頻系列Chiller

—壓縮機複疊制冷，溫度低至-115℃

冠亞恒溫制冷循環器Chiller溫度範圍從-115℃到30℃，采用二次過冷技術，制冷迅速。産品可靠性強，性能優異。

真空控溫卡盤Chuck

—8寸卡盤、12寸卡盤、冷板

冠亚恒温LNEYA真空控溫卡盤Chuck提供8寸卡盘、12寸卡盘以及非标定制方形冷板，支持-70~+200℃宽温度范围，也可以定制各种其他温度范围，内置多个温度传感器，多区控温，精确FID调节控温；支持直冷、液冷、?冷；

Chiller換熱型

—無壓縮機換熱機組

冷卻水溫度5℃~+90℃，采用ETCU無壓縮機換熱系統，系統可通用膨脹罐、冷凝器、冷卻水系統等，可以有效減少設備尺寸，減少操作步驟

接觸式高低溫測試機

—芯片設計、芯片生産過程測試

設備應?溫度範圍-75~+200℃，?持從極低溫到?溫的快速升溫和降溫，最快速率可達到75℃/min，能夠精確的控制溫度，誤差通常在±0.2℃以內。

ZLJ系列直冷機

—可運用于?體捕集

將制冷系統中的制冷劑直接輸出蒸發進??標控制元件（換熱器）換熱，從?使?標控制對象降溫。具備換熱能力相對于流體（?體）輸送?換熱器換熱能?更??般在5倍以上，這樣特別適?于換熱器換熱?積?，但是換熱量?的運?場所。

ZLTZ高效換熱控溫機組

—高效換熱，可?動回收導熱介質

ZLTZ控溫機組與微通道反應器組合成?放熱量控溫運?，同流量?況下相對于導熱油換熱控溫傳熱效率5倍以上，同時進出?溫差?，溫度場均勻性?，特別適合劇烈放熱反應的應?；

芯片老化測試箱Chamber

—芯片高低溫老化設備

通過精確控制溫度、濕度等環境參數，模擬芯?在實際使?中可能遇到的?溫、?濕、?應?等極端條件，加速芯?的?化過程，通過這種?式，可以在短時間內篩選出早期失效的芯?，優化設計?案，提升産品良率

多層試驗箱Chamber

—寬溫度控制範圍-80℃~+150℃

左右多層試驗箱提供温度范围-80℃~+150℃宽温度范围控温，空载温度均匀度±1℃，温度精度±0.1℃，满足多样化场景需求。

LQ系列氣體冷卻裝置

—低溫可達-110℃

應?于將?體（?腐蝕）降溫使?：如?燥壓縮空?、氮?、氩?等常溫?體通?到LQ系列設備內部，出來的?體即可達到?標低溫溫度，供給需求測試的元件或換熱器中。

AES系列熱流儀

—升降溫速率快，+150℃?-55℃低于10S

射流式?低溫沖擊測試機給芯?、模塊、集成電路板、電?元器件等提供精確且快速的環境溫度。是對産品電性能測試、失效分析、可靠性評估的儀器設備。

AET系列氣體快速溫變測試機

—可選擇控制出口氣體溫度和工藝目標過程溫度

壓縮空?進??體快速溫變測試機，內置有?燥器，預先把?體?燥到露點溫度-70度以下，進?制冷加熱控溫輸出穩定流量壓?恒溫的?體，對?標對象進?控溫（如各類控溫卡盤、腔體環境、熱承板、料梭、腔體、電?元件等），可根據遠程卡盤上的溫度傳感器進??藝過程控溫，?動調節輸出?體的溫度。

AI系列循環風系統

—循環風高低溫恒溫測試

運?于半導體設備?低溫測試。電?設備?溫低溫恒溫測試冷熱源；獨?的制冷循環?機組；可連續?時間?作，?動除霜，除霜過程不影響庫溫；

Dryer氣體幹燥器

—低露點?燥和清潔

應?于傳感器、半導體制造、薄膜和包裝材料執照、粉狀物料運輸、噴塗系統、?品?業、制藥?業等需要實現-80℃低露點?燥和清潔的分布式?源。

負壓型溫控機組

—實現溫度波動≤±0.3℃

負壓型控溫系統通過負壓環境下的流體循環實現精准溫度控制，原理：通過負壓發?器驅動導熱介質（?/油）循環，避免泄漏?險，適?于各種類型板卡冷卻。

"How on earth should I know?" I stiffened up as though I heard a thief picking the lock of my lawful treasure. She threw me, side wise, a bantering smile and then a more winsome glance, but I refused to see either. I burned with so many feelings at once that I could no more have told them than I could have raised a tune. "Don't you like him?" she asked, and tried to be very arch. "But where does all this lead?" pondered the Doctor, half falling in with her mood. "Why not make some things permanent and as good as they can be?" It was well over at length, but the mild little cashier had nothing to say except that he really must go over to the Raven's Arms and have a little brandy. Abstemious man as he was, he felt it was necessary. Presently the blood came back to his face again, and his dilated pupils contracted. Some uphold the accusation on the ground of expressions in Belgian newspapers, collected in a German pamphlet. In my opinion these quotations have not the slightest value. Everyone will understand this who thinks of the excitement of journalists, whose country was suddenly and quite unexpectedly involved in a terrible war, and who felt now that as journalists they had to perform a great, patriotic duty. In their nervous, over-excited condition they sat at their desk and listened to the gossip of refugees about civilians taking part in the struggle. In their imagination they saw hordes of barbarians overrun their native soil, saw man and man, woman88 and woman, shoulder to shoulder, resisting the invader without regard for their own life. The thoughts of such journalists, whose very own country had been at war now for a few days, were not on severe logical lines; they found a certain beauty in that picture, and I can quite understand how some came to believe in it as a reality, and gloried in it. Hath Justice turned approving eyes on him; The contrast is not only direct, but designed, for Euripides had the work of his predecessor before him, and no doubt imagined that he was improving on it. 10th June Do you wish to do something, Daddy, that will ensure your I get a perspective on the world, that other people who have been Yours, for ever and ever, At six o'clock Kirby knocked the ashes from his pipe, the other two men, who had buried themselves in the last Cornhill and Punch with entire disregard of the rest of the room, put down the magazines, and all of them rose. "We dine at seven," Mrs. Kirby said to Taylor and Cairness as she passed through the door, followed by her husband. "Say, cul," said the Englishman, in the friendliest sort of way, "w'at was ye wantin' around among my men?" "That's a pretty slick horse you're driving," said the Lieutenant. "Looks entirely too slick to belong to Chattanooga. It's a much better horse than mine. I've a notion—" "Major, I was tryin' to say" "Yes, indeedy," said the boy, crossing his heart earnestly. Shorty folded up the piece of dress goods tenderly, placed it securely in the breast-pocket of his blouse, and trudged over to the station, stopping on the summit of the hill to take a last look at the house. It was a long, hard walk for him, for he was yet far from strong, but he got their before train time. "A train came in while I was at the depot," the Sheriff explained, as he entered the office. "It had on it a regiment going home on veteran furlough. I asked the Major in command to come over and help us. He and his boys was only too glad for a chance to have some fun and stretch their legs. They came off the cars with a whoop as soon's they knowed what was wanted. Now, you boys kin go home and git a good night's sleep. I'll take these prisoners along with the regiment over to the next County seat, and keep 'em there till things cool down here. I'm awfully obliged to you." "She said she wouldn't do anything—yet. But she left it open." "Dodd," he said. "John Dodd. They call me Johnny." "He's safe enough now—we may as well go and have a look round." "Someone go fur the Squire." "Bear that man to the tumbrel—an hour or two there may teach him better manners!" "I will go. Can we measure the mercy of the Lord?" HoME 普xx成人网站ENTER NUMBET 0019mlgou.com.cn
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